Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
نویسندگان
چکیده
منابع مشابه
Measurement of Liquid Properties with Resonant Cantilevers
Liquid viscosity and density sensors are essential devices in online process or condition monitoring. Microacoustic sensors combine advantages such as small size, low cost, and absence of macroscopically moving parts. However, these devices feature measurement at high shear rates and, therefore, the results may diverge from those obtained with traditional viscometers. In our contribution we inv...
متن کاملPiezoelectric microelectromechanical resonant sensors for chemical and biological detection.
Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors...
متن کاملislanding detection methods for microgrids
امروزه استفاده از منابع انرژی پراکنده کاربرد وسیعی یافته است . اگر چه این منابع بسیاری از مشکلات شبکه را حل می کنند اما زیاد شدن آنها مسائل فراوانی برای سیستم قدرت به همراه دارد . استفاده از میکروشبکه راه حلی است که علاوه بر استفاده از مزایای منابع انرژی پراکنده برخی از مشکلات ایجاد شده توسط آنها را نیز منتفی می کند . همچنین میکروشبکه ها کیفیت برق و قابلیت اطمینان تامین انرژی مشترکان را افزایش ...
15 صفحه اولLiquid-phase chemical sensing using lateral mode resonant cantilevers.
Liquid-phase operation of resonant cantilevers vibrating in an out-of-plane flexural mode has to date been limited by the considerable fluid damping and the resulting low quality factors (Q factors). To reduce fluid damping in liquids and to improve the detection limit for liquid-phase sensing applications, resonant cantilever transducers vibrating in their in-plane rather than their out-of-pla...
متن کاملHeater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure pa...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Sensors
سال: 2009
ISSN: 1687-725X,1687-7268
DOI: 10.1155/2009/637874